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In Situ Electrical Contacts to Graphene by Laser Scribing
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    In Situ Electrical Contacts to Graphene by Laser Scribing
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    • Won Gyun Park
      Won Gyun Park
      Department of Electronics Engineering, Chungnam National University, Daejeon 34134, Republic of Korea
      More by Won Gyun Park
    • Sang-Chan Park
      Sang-Chan Park
      Department of Electronics Engineering, Chungnam National University, Daejeon 34134, Republic of Korea
      More by Sang-Chan Park
    • Hui Jae Cho
      Hui Jae Cho
      Korea National NanoFabcCenter (NNFC), Daejeon 34141, Republic of Korea
      More by Hui Jae Cho
    • Yeon-Wha Oh
      Yeon-Wha Oh
      Korea National NanoFabcCenter (NNFC), Daejeon 34141, Republic of Korea
      More by Yeon-Wha Oh
    • Il-Suk Kang
      Il-Suk Kang
      Korea National NanoFabcCenter (NNFC), Daejeon 34141, Republic of Korea
      More by Il-Suk Kang
    • Jae-Hyuk Ahn*
      Jae-Hyuk Ahn
      Department of Electronics Engineering, Chungnam National University, Daejeon 34134, Republic of Korea
      *Email: jaehyuk@cnu.ac.kr
      More by Jae-Hyuk Ahn
      https://orcid.org/0000-0001-7490-000X
    Other Access OptionsSupporting Information (3)

    ACS Applied Nano Materials

    Cite this: ACS Appl. Nano Mater. 2024, 7, 9, 10952–10962
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    https://doi.org/10.1021/acsanm.4c01659
    Published April 23, 2024
    Copyright © 2024 American Chemical Society
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    Abstract

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    Graphene with an atomically thin structure is considered to be a highly sensitive transducer capable of converting diverse external stimuli into measurable electrical signals. The generated signals, such as current and resistance, can be extracted through electrical contact to graphene. Conventional methods for contact formation are usually based on physical deposition of conductive materials on the target graphene. Here, we propose a method for in situ chemical synthesis of electrical contacts to graphene as an alternative approach that complements conventional physical methods. CO2 laser irradiation on a polyimide film with monolayer graphene on top can convert the polyimide surface to conductive electrodes of laser-induced graphene (LIG) that electrically connect to the existing graphene channel. Laser-scribing conditions, such as the power and scan rate, can modulate the contact resistance of the LIG–graphene junction. Various arbitrary shapes of in situ LIG contacts can be scribed to the direct writing ability of the laser. The proposed in situ LIG contact method can be extended to other carbon nanomaterials, such as carbon nanotubes and PEDOT:PSS. As a proof of concept of the in situ LIG contacts to graphene for electronic device applications, graphene field-effect transistors were demonstrated on a graphene-supported polyimide substrate with LIG–graphene junctions as source/drain electrodes. Our approach will pave the way for the simple and low-cost fabrication of versatile graphene electronic devices by utilizing the existing LIG technology specialized for energy devices and sensors.

    Copyright © 2024 American Chemical Society

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    Supporting Information

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    The Supporting Information is available free of charge at https://pubs.acs.org/doi/10.1021/acsanm.4c01659.

    • Abrupt increase in conductance when the laser started to synthesize the LIG electrode that connected the preformed LIG electrode and the graphene channel (MP4)

    • Continuous increase in conductance for the second test structure when direct laser writing gradually decreased the channel length by expanding the LIG electrode (MP4)

    • Additional experimental details, methods, and results; comparison between the LIG-last process (in situ LIG contact) and LIG-first process; temperature sensing using the in situ LIG-contacted graphene device; Raman analysis and electrical characterization to identify graphene layers on a PI substrate; passivation on LIG electrodes to improve adhesion; bending test of in situ LIG-contacted graphene devices; test patterns to investigate the effects of laser conditions on the electrical characteristics of in situ LIG-contacted graphene devices; test patterns to extract the contact resistance of in situ LIG contacts to graphene; electrical contacts to graphene by silver ink; SEM images of LIG electrodes with varying scan rates; Raman analysis of LIG electrodes with varying scan rates; XRD results of LIG electrodes with varying scan rates; XPS results of LIG electrodes with varying scan rates; resolution of in situ LIG electrodes; fabrication process and real-time electrical monitoring of in situ LIG contacts to graphene; in situ LIG contacts to mono-, bi-, and trilayer graphene; fabrication process of graphene field-effect transistors with in situ LIG contacts; measurement setups for graphene field-effect transistors; and peak area and elemental data from XPS and SEM (EDS) measurements (PDF)

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    Cited By

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    This article is cited by 6 publications.

    1. Sang-Chan Park, Won Gyun Park, Chulsoo Kim, Jae-Hyuk Ahn. Through-Layer Contact with Encapsulated Graphene Using One-Step Laser Scribing. ACS Applied Materials & Interfaces 2025, 17 (33) , 47474-47486. https://doi.org/10.1021/acsami.5c09559
    2. Sikandar Aftab, Ganesh Koyyada, Maria Mukhtar, Fahmid Kabir, Ghazanfar Nazir, Sufyan Ali Memon, Muhammad Aslam, Mohammed A. Assiri, Jae Hong Kim. Laser-Induced Graphene for Advanced Sensing: Comprehensive Review of Applications. ACS Sensors 2024, 9 (9) , 4536-4554. https://doi.org/10.1021/acssensors.4c01717
    3. Ki Wan Kim, Won Gyun Park, Do‐Yeon Lee, Ga‐Won Lee, Binghao Wang, Jae‐Hyuk Ahn. In‐Situ Vertical‐Contact Engineering of Laser‐Induced Graphene Nanotips for Ultra‐Sensitive Humidity Sensors. Small 2025, 21 (34) https://doi.org/10.1002/smll.202505017
    4. Xizhi Chen, Yong Li, Yunhua Wu. A disposable electrochemical biosensor for detection H2S in protoplast. Microchemical Journal 2025, 212 , 113180. https://doi.org/10.1016/j.microc.2025.113180
    5. Aoxun Liang, Wenhao Dong, Xiaoyu Li, Xueye Chen. A novel dual-mode paper fiber sensor based on laser-induced graphene and porous salt-ion for monitoring humidity and pressure of human. Chemical Engineering Journal 2024, 502 , 158184. https://doi.org/10.1016/j.cej.2024.158184
    6. Won Gyun Park, Jeong-Hyeon Park, Sang-Chan Park, Kiwan Kim, Eun-Ho Lee, Jae-Hyuk Ahn. Influence of heat transfer at the graphene–polyimide interface on laser-induced graphene formation. Applied Physics Letters 2024, 125 (3) https://doi.org/10.1063/5.0207413
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    ACS Applied Nano Materials

    Cite this: ACS Appl. Nano Mater. 2024, 7, 9, 10952–10962
    Click to copy citationCitation copied!
    https://doi.org/10.1021/acsanm.4c01659
    Published April 23, 2024
    Copyright © 2024 American Chemical Society
    Request reuse permissions

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