GS0608 保護熱板法による低熱抵抗薄膜の熱伝導率測定 GS0608 Measurement of Thermal Conductivity of Low Thermal Resistance Thin Film by Guarded Hot Plate Method

The guarded hot plate (GHP) method was applied to measure thermal conductivity of low-thermal-resistance thin-film of about 1×10^<-5>m^2・K/W in the thickness direction. In this study, to enable this measurement, water-cooled heat spreaders were attached to both sides of cooling hot plates in order to provide a large heat flux (〜3×10^5W/m^2) to the specimen. As a result, it was suggested that the measurement of such a low-thermal-resistance thin-film is possible by using the experimental equipment proposed here.