Automated Process Monitoring Integration
scoutDX
The scoutDX is a real-time online monitor of metal contamination for all semiconductor chemicals. It can immediately detect trace impurities in chemicals being delivered before they are accepted, process and supply chemicals for the FAB, and any other liquids that need to be monitored for ultra-trace impurities including UPW.
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Radian VPD-ICPMS
The Radian VPD-ICPMS is a completely automated tool for online monitoring of metal contamination on semiconductor wafers. The Radian’s single process station design and fully integrated ICPMS (direct transport of scan solution from scan nozzle to ICPMS) minimize the risk of contamination common in the VPD-ICPMS process.
